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Microelectronics

This series of information sheets will help those working with microelectronics to comply with their duties under the Control of Substances Hazardous to Health Regulations 2002 (as amended) to control exposure to hazardous substances and protect workers' health.

Microelectronics [MC]

Wet etch processing (PDF) [27]

This sheet describes good practice using containment where possible, or engineering control (local extraction or an extracted booth). It covers the points you need to follow to reduce exposure to an adequate level. It is important to follow all the points, or use equally effective measures.

Related items

Chemical Vapour Deposition (CVD) (PDF) [31]

This sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

G409: Exposure measurement: Air sampling (PDF) [32]

Dry etch processing (PDF) [33]

This sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

Epitaxial deposition (PDF) [37]

This sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

Photolithography processing (PDF) [41]

This sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

G409: Exposure measurement: Air sampling (PDF) [42]

Ion implantation (PDF) [43]

This sheet describes good practice using containment, with extraction, and covers the points you need to follow to reduce exposure to an adequate level. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

Link URLs in this page

  1. COSHH Essentialshttps://www.hse.gov.uk/coshh/essentials/index.htm
  2. Overview - Direct advice sheetshttps://www.hse.gov.uk/coshh/essentials/direct-advice/index.htm
  3. Agriculture (Farming)https://www.hse.gov.uk/coshh/essentials/direct-advice/agriculture.htm
  4. Flour (Bakers and millers)https://www.hse.gov.uk/coshh/essentials/direct-advice/baking.htm
  5. Metalworking fluidshttps://www.hse.gov.uk/coshh/essentials/direct-advice/metalworking-fluids.htm
  6. Microelectronicshttps://www.hse.gov.uk/coshh/essentials/direct-advice/microelectronics.htm
  7. Motor Vehicle Repairhttps://www.hse.gov.uk/coshh/essentials/direct-advice/mvr.htm
  8. Offshorehttps://www.hse.gov.uk/coshh/essentials/direct-advice/offshore.htm
  9. Printinghttps://www.hse.gov.uk/coshh/essentials/direct-advice/printing.htm
  10. RPEhttps://www.hse.gov.uk/coshh/essentials/direct-advice/respiratory-protective-equipment.htm
  11. Rubberhttps://www.hse.gov.uk/coshh/essentials/direct-advice/rubber.htm
  12. Service & Retailhttps://www.hse.gov.uk/coshh/essentials/direct-advice/service-retail.htm
  13. Overview - Silicahttps://www.hse.gov.uk/coshh/essentials/direct-advice/silica.htm
  14. Brick and tilehttps://www.hse.gov.uk/coshh/essentials/direct-advice/brick-tile-silica.htm
  15. Ceramicshttps://www.hse.gov.uk/coshh/essentials/direct-advice/ceramics-silica.htm
  16. Constructionhttps://www.hse.gov.uk/coshh/essentials/direct-advice/construction-silica.htm
  17. Foundryhttps://www.hse.gov.uk/coshh/essentials/direct-advice/foundry.htm
  18. Manufacturinghttps://www.hse.gov.uk/coshh/essentials/direct-advice/manufacturing-silica.htm
  19. Quarrieshttps://www.hse.gov.uk/coshh/essentials/direct-advice/quarries-silica.htm
  20. Stoneworkershttps://www.hse.gov.uk/coshh/essentials/direct-advice/stonemasons.htm
  21. Skin or eye contacthttps://www.hse.gov.uk/coshh/essentials/direct-advice/skin-eye-contact.htm
  22. Weldinghttps://www.hse.gov.uk/coshh/essentials/direct-advice/welding.htm
  23. Woodworkinghttps://www.hse.gov.uk/coshh/essentials/direct-advice/woodworking.htm
  24. Dichloromethane (DCM)https://www.hse.gov.uk/coshh/essentials/direct-advice/dichloromethane.htm
  25. Frequently asked questionshttps://www.hse.gov.uk/coshh/essentials/faq.htm
  26. Advice for managershttps://www.hse.gov.uk/pubns/guidance/mc0.pdf
  27. Wet etch processinghttps://www.hse.gov.uk/pubns/guidance/mc1.pdf
  28. G409: Exposure measurement: Air samplinghttps://www.hse.gov.uk/pubns/guidance/g409.pdf
  29. S101: Selecting protective gloveshttps://www.hse.gov.uk/pubns/guidance/s101.pdf
  30. S102: Selecting personal protective equipment (PPE)https://www.hse.gov.uk/pubns/guidance/s102.pdf
  31. Chemical Vapour Deposition (CVD)https://www.hse.gov.uk/pubns/guidance/mc2.pdf
  32. G409: Exposure measurement: Air samplinghttps://www.hse.gov.uk/pubns/guidance/g409.pdf
  33. Dry etch processinghttps://www.hse.gov.uk/pubns/guidance/mc3.pdf
  34. G409: Exposure measurement: Air samplinghttps://www.hse.gov.uk/pubns/guidance/g409.pdf
  35. R5: Breathing apparatus with UK Standard Assigned Protection Factor 40https://www.hse.gov.uk/pubns/guidance/rpe5.pdf
  36. R6: UK Standard Assigned Protection Factor 2000 (APF 2000)https://www.hse.gov.uk/pubns/guidance/rpe6.pdf
  37. Epitaxial depositionhttps://www.hse.gov.uk/pubns/guidance/mc4.pdf
  38. G409: Exposure measurement: Air samplinghttps://www.hse.gov.uk/pubns/guidance/g409.pdf
  39. S101: Selecting protective gloveshttps://www.hse.gov.uk/pubns/guidance/s101.pdf
  40. S102: Selecting personal protective equipment (PPE)https://www.hse.gov.uk/pubns/guidance/s102.pdf
  41. Photolithography processinghttps://www.hse.gov.uk/pubns/guidance/mc5.pdf
  42. G409: Exposure measurement: Air samplinghttps://www.hse.gov.uk/pubns/guidance/g409.pdf
  43. Ion implantationhttps://www.hse.gov.uk/pubns/guidance/mc6.pdf
  44. G409: Exposure measurement: Air samplinghttps://www.hse.gov.uk/pubns/guidance/g409.pdf
  45. R5: Breathing apparatus with UK Standard Assigned Protection Factor 40https://www.hse.gov.uk/pubns/guidance/rpe5.pdf
  46. Working with substances hazardous to health: A brief guide to COSHHhttps://www.hse.gov.uk/pubns/indg136.htm
  47. Case studieshttps://www.hse.gov.uk/coshh/casestudies/index.htm
  48. Example risk assessmentshttps://www.hse.gov.uk/coshh/riskassess/index.htm
  49. Publicationshttps://www.hse.gov.uk/coshh/publications.htm
  50. Nanotechnologyhttps://www.hse.gov.uk/nanotechnology/index.htm
  51. Risk assessmenthttps://www.hse.gov.uk/risk/index.htm

Glossary of abbreviations/acronyms on this page

RPE
Respiratory Protective Equipment

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2024-05-03